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The effect of FFU purification unit and laminar flow hood on clean room

Views: 1     Author: Site Editor     Publish Time: 2020-11-16      Origin: Site

Article cover 566-378

FFUThe role of the purification unit and laminar flow hood on the clean room (clean engineering), as the clean engineering plant has different requirements according to different usage requirements, such as 10, 100, 1000, 10,000, and 100,000 , 300,000 grades or even higher cleanliness requirements of the working environment, and the FFU fan filter unit has emerged, the emergence of the FFU fan filter unit has solved this problem well.

The use of FFU fan filter unit can well solve the problems existing in clean engineering.

The main points are as follows:

1. Save space-the use of FFU fan filter unit can effectively save space and solve the problem of narrow maintenance space at the top of the clean room ceiling.

Because high-level clean workshops require a hundred or even ten-level laminar flow hoods to solve the process requirements, huge air supply static pressure boxes will be set up on the upper part of the clean room ceiling, and fans will be set up in the static pressure boxes. These static pressure boxes Together with the air supply pipe and the return air pipe, it will occupy a lot of space, making the maintenance space narrow, and sometimes even affecting the use of fire escapes.

When we use FFU, the ceiling of the clean room will be divided into several modules, each module is an FFU, so that we can meet the pressure balance requirements of the air supply static pressure box on the ceiling by adjusting each module, thus greatly The requirements for the height of the static pressure box are reduced. At the same time, huge air supply pipes and return air pipes can be omitted, so installation space can be saved. Especially when the renovation project is limited by the height of the floor, FFU can effectively solve this problem. Moreover, the FFU has various sizes, which can be customized according to the actual size of the clean room. For this reason, it occupies less layer height in the air supply static pressure box, and even basically does not occupy the clean room space, so it can save better space.

2. FFU flexibility-utilizationFFUThe independent structural feature can be adjusted at any time to make up for the lack of mobility of the clean room, thereby solving the shortcomings of the production process that should not be adjusted. The maintenance structure of the clean room workshop is generally made of metal panels. Generally, after completion, the layout cannot be changed at will. However, due to the continuous updating of the production process, the original plant cleanliness layout cannot meet the needs of new processes, resulting in the clean room due to products The replacement requires frequent changes, which wastes a lot of financial and material resources. If you increase or decrease the number of FFUs, you can locally adjust the cleanliness layout of the room to meet process changes, and the FFU comes with its own power, vents, and lamps, which can save a lot of investment. It is almost impossible to achieve the same effect for a purification system with a centralized air supply. Because FFU is self-powered, it is not limited by area. In a large clean workshop, it can be controlled in zones according to needs. Moreover, with the changes in semiconductor production processes, the layout of the plant must be adjusted accordingly. The flexibility of FFU makes such adjustments easy, and it will not bring secondary investment.

3. Reduce operating costs-The FFU system saves energy significantly, thus solving the shortcomings of centralized air supply due to the large air-conditioning room and the increased operating cost of the air-conditioning unit.

If the individual clean rooms of a larger clean room plant have a higher level of cleanliness, then the air-conditioning unit with centralized air supply has a larger air volume and a higher fan pressure head to overcome the resistance of the air duct and the primary filter. , The resistance of the medium-efficiency filter and the high-efficiency filter can meet the demand. Moreover, as long as the air conditioner fails in the centralized air supply system, all clean rooms involved in this air conditioner will stop operating.

Although FFU is selected in the early stage, the initial investment is higher than the use of air duct ventilation, but in the later operation, it prominently exhibits the characteristics of energy saving and maintenance-free, making FFU more popular.

4. Negative pressure sealing

this isFFUUnique features. Because it can provide static pressure, the air supply static pressure box has negative pressure relative to the clean room. Therefore, even if there is leakage in the installation of the tuyere, the clean room will leak to the static pressure box, which will not cause pollution to the clean room. Makes the seal simple and safe.

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