According to my country's \"Specifications for the Design of Clean Factory\" (GB 50073), the number of air changes required for non -unilateral clean room engineering, clean room engineering, and sterile room projects of different levels The number of speed/air replacement has always been a problem that has received attention in the design of the clean room. With the increase in the control effect of the pollution sources and the increase of the efficiency of the end filter, whether the recommendation or reference value of the relevant specifications and guidelines, etc. There are many discussions that are preserved;
The application of clean technology has experienced the development of more than half a century, and its application range is increasingly wide and technical requirements are more complicated. Currently, its representative application is the microelectronics industry, medical and health and electronic industries. Its application areas: 01. Microelectronics industry 02. Semiconductor manufacturing 03. Pharmaceutical industry 04. Optical industry 05. Biotechnology Industry 06. Pure chemical reagent manufacturing 07. Micromechanical processing industry 08. Hospital and other health care institutions 09. Production and Packaging Industry of Medical Devices and Transplanting Devices 10. Food & Beverage Industry 1. Microelectronics Industrial Microelectronics Industry is currently the highest in the clean room. The development of large-scale and large-scale integrated circuits (LSI, VLSI) is increasingly high. In the integrated circuit manufacturing process, the larger the integration, the finer the graphic size (represented by the line width), the smaller the size of the cleansing chamber control particle size (
The clean air blown out of the air shower can remove dust carried by people, and can effectively block or reduce the dust source from entering the clean area. At the same time, the two doors of the air shower room are electronically interlocked, which can act as an air lock to prevent unpurified air from entering the clean area. It is a highly versatile local purification equipment.
Generally speaking, the use of the air shower room in a humid environment will definitely not have a long period of use in a dry environment, because the outside and inside of the air shower room will be corroded to a certain extent in a humid environment, especially the electrical parts occasionally have a small impact , But the impact is not big.
Clean shedWidely used in the purification environment, it is essentially different from the dust-free workshop.1. The clean room is a small space enclosed by anti-static transparent plastic cloth in a turbulent clean room space. It adopts independent HEPA or ULPA and air-conditioning blower units to